Novellus 99-0339 Aura A2000LL Plasma Asher Stripper GaSonics Non-Copper Surplus

Part No: 99-0339
Model No: A2000LL
Diagram No: 99-2884
AURA 2000-LL
Non-Copper
CE Marked

Installed Components
Load Lock Chamber Part No: A01-218-01
Asyst Technologies Indexer Elevator Part No: 04630-003, GaSonics 94-1175
Asyst Technologies Indexer Elevator Part No: 04630-004, GaSonics 94-1174
Asyst Technologies Load Lock Elevator Part No: 04290-201, GaSonics 94-1118
Asyst Technologies Load Lock Elevator Part No: 04290-101, GaSonics 94-1119
Dexon FFU Part No: MS43E-1040
GaSonics Loadlock Rear Panel Display Part No: A95-107-01
MKS Instruments Baratron Part No: 622A11TDE
MKS Instruments Pressure Controller Part No: 152H-P0, Type 150
MKS Instruments Valve Part No: 253B-11020
Novellus Systems Waveguide Part No: 95-4477
Varian Valve Part No: L6281703
Omron PLC Part No: C40H-060R-DE-V1, SYSMAC C40H

Installed PCB's
GaSonics PCB Part No: A90-031-03, PLASMA/LAMP FAILURE DETECTION
GaSonics PCB Part No: 90-2658, CONTROLLER BOARD
GaSonics PCB Part No: 90-2609, DISPLAY DECODER
GaSonics PCB Part No: 90-2608, LOADLOCK INTERFACE BD
Hine Design PCB Part No: 02423-001, 06764-001, ARM CONTROLLER BOARD
Novellus Systems PCB Part No: 90-2735, INTERLOCK BD, A2000

This Novellus 99-0339 Aura A2000LL Plasma Asher Stripper is used working surplus.
The unit is missing the wafer handling robot/arm unit, has scuffs and dents
to the outer panels (see photos). The physical condition is good, but there are signs
of previous use and handling.