Gasonics 99-0339 Aura A2000LL Plasma Asher

Part No: 99-0339
Model No: A2000LL
Diagram No: 99-2884
AURA 2000-LL
Non-Copper
CE Marked
Sold As-Is

Installed Components
Load Lock Chamber Part No: A95-205-01, 56-7923
Asyst Technologies Indexer Elevator Part No: 04630-003, GaSonics 94-1175
Asyst Technologies Indexer Elevator Part No: 04630-004, GaSonics 94-1174
Asyst Technologies Load Lock Elevator Part No: 04290-201,
GaSonics 94-1118 (Qty. 2)
GaSonics Loadlock Rear Panel Display Part No: Undetermined
MKS Instruments Baratron Part No: 122A Series
MKS Instruments Pressure Controller Part No: 152H-P0, Type 152
MKS Instruments Valve Part No: 253B-11020
HNL Asher Module Part No: Undetermined
Varian Valve Part No: L6281-701
Varian Valve Part No: L6281703
Omron PLC Part No: C40H-060R-DE-V1, SYSMAC C40H

Installed PCB's
GaSonics PCB Part No: 90-2658, CONTROLLER BOARD
GaSonics PCB Part No: 90-2609, DISPLAY DECODER
GaSonics PCB Part No: 90-2608, LOADLOCK INTERFACE BD
Hine Design PCB Part No: 02423-001, 06764-001, ARM CONTROLLER BOARD
Novellus Systems PCB Part No: 90-2735, INTERLOCK BD, A2000

This GaSonics 99-0339 Aura A2000LL Plasma Asher Stripper is
used untested surplus and is being sold as-is.
The system is missing the wafer handling robot/arm unit and other items.
Some of the components have some minor surface corrosion, scuffs, dents,
and bends to the outer panels (see photos). The physical condition is good,
but there are signs of previous use and handling.