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Brand: Allwin21
Allwin21 AW-2001R Etcher

Features:
Designed with III-V Production in Mind.
Controller with Touchscreen GUI and PentiumⓇ Grade PC.
The 3-axis wafer transport robot installed:
Superior than Gasonics Aura AE-2001 design that’s synonymous for wafer breakage and constant alarms/errors.
INCREASED THROUGHPUT
Receive cassette station can be substituted with a Cooling/Alignment station to prevent wafer breakage.
NO OBSOLETE PARTS.
Water-Cooled 1000W Magnetron/Waveguide with an AGL Microwave Power Generator for BETTER PROCESS REPEATABILITY.
BETTER UNIFORMITY by using “extended” Alumina Plasma Tube.
Option to run different wafer sizes without any hardware changes.
Specifications:
Wafer Size: 2, 3, 4, 5, 6 inch Capability.
Chuck Temperature: 60-110ºC (±2 ºC)
Gases: NF3 CF4 HE O2
Uniformity:
100mm : ± 3% (5% 3 sigma) *
150mm : ± 5% (8% 3 sigma) *
*max.- min. /2 x average
Reproducibility (w-t-w): 10% 3 sigma
Particulate: 0.05p/cm2 > 0.3µm
NO DAMAGE: ≤0.1 Volt CV-shift