OAI 806 MBA NUV 4" Mask Aligner
AMERICA North (USA-Canada-Mexico)
OAI Model 806 MBA NUV 4" Mask Aligner is a four-camera, manual,
optical backside mask aligner system that is designed to greatly surpass the performance of IR backside aligners. Provides full optical backside alignment and
is ideal for use in R&D labs, universities, and low volume production.
Built on an anti-vibration table, the fixed mask holder assembly
virtually guarantees alignment accuracy and repeatability.
Using the Model 806 MBA is a simple process, as all functions are controlled via
the easy to read LCD screens.
Currently configured with 4" wafer chuck.
500 watt NUV lamp housing with 365-440nm mirrors.
Sub-micron level-to-level alignment. High efficiency, uniform exposure system Intensity
controlled power supply. User definable operational parameters.
Modular design. Motorized backside focus. Dual video cameras with LCD screens.
Very versatile, front/backside optical alignment system.
SYSTEM NO LONGER SUPPORTED BY OAI.
We will fully test the system and make sure it is in
good working condition at time of sale.