Others AE-2000LL

Brand: GaSonics
Model: AE-2000LL
The GaSonics Aura Loadlock
Isotropic Etcher

Used
Details:
Is a microprocessor-controlled
down-stream etcher that etches the font
and optionally
the backside of a wafer
The AE-200LL uses a
dual-pumping loadlocked system
with a heated split-pattern design
wafer transport arms
and wafer storage elevators
The AE-2000LL can be used
with wafers of 5-8 inch with
only minor hardware modifications

Single wafer processing
Four process gas
mass flow controllers
5", 6" and 8" wafer capability
Throughput: 20 to 40wph
depending on process parameters
Through-the-wall, or flush-mount configuration
Programmable microprocessor
Automatic wafer loader/unloader
Main Control Panel
Regulated platen heat source
for process temperature control
Downstream processing
Soft-start vacuum system on loadlock chamber
Ceramic plasma tube (chamber)
Equipped with hard-wired safety interlocks
Frontside etching
(also capable of backside etching)
In-line cassette to cassette
Visual alarms