Oxford 100 ICP-RIE 180

- Current gas configuration: H2, O2, N2, Ar, CF4, SF6, CHF3, He, CH4
- Backup gases: Cl2 and BCl3
- Standard operating temperature: 20°C
- Operating temperature range: 5 - 70°C
- Substrate cooling: Thermo Electron RTE water chiller
- RF source 300 W, 13.56 MHz
- ICP source 3000 W, 13.56 MHz
- Base pressure: 1E-6 Torr
- Retrofitted load lock

Pumps:
Main Chamber Backing Pump:
- Type: Dry pump (multi roots)
- Model: ADP 122 P

Main Chamber Turbo Pump:

- Manufacturer: Pfeifer Vacuum
- Type: Turbo
- Model:TPH521PC