Menu

Oxford NGP1000 ICP 380

Ref : 2152352-9-W
Condition : Used
Manufacturer : Oxford
Model : NGP1000 ICP 380
Year(s) : 2006
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 07 Feb. 2022

- Load Locked Chamber
- Carrier Plate to run batches of (qty 4) 150mm wafers per run
- Carrier Plate to run batches of (qty 6) 100mm wafers per run
- System PC, Keyboard, Mouse
- Windows 7 w/ PC4000 Software
- Heated or Fluid-Cooled RIE Etch Lower Electrode w/ 3,000W, 13.56MHz RF Generator
- 490mm Diameter Aluminum Lower Electrode
- 208V ICP380 Source w/ 5kW, 2MHz RF Generator w/ Electrostatic Shield
- Dual Magnetic Spacer for improved ICP uniformity with little to no RIE Power
- Mechanical Wafer Clamping
- Optical Endpoint Detector
- Pneumatic Chamber Lift Kit
- Chamber Heating Kit
- Adixen ATH1600MT Turbo Pump
- Adixen ADP122P Dry Pump
- Adixen ACP40G Dry Pump
- Julabo FC1600 Chiller
- Operations Manual and Documentation

Other machines similar to Oxford NGP1000 ICP 380

5
Location : AMERICA North (USA-Canada-Mexico)
Year(s) : 1994
1
Location : AMERICA North (USA-Canada-Mexico)
1
Location : AMERICA North (USA-Canada-Mexico)
1
Location : AMERICA North (USA-Canada-Mexico)