PVA TePla Giga 690

Short Description Microwave Plasma Cleaner
Date of Manufacture 2015
Operational Status (fully functional, repairs needed, any cannibalization) Fully functional
Electrical Power Configuration (voltage, phase) AC 230/400V, 3 Phase, 50/60Hz
Substrate Loading Configuration Load using magazine and Out using Magazine
Short Paragraph Describing this tool: Cleaning of advanced chip packages using
oxygen or argon plasma

Process Configuration
Attribute (Chamber #, etc.) CDA ( 4 – 6 Bar )
Gas input O2 (1 – 3 Bar )

System Configuration
Modules / Features / Tool Options Qty
1 Transportsection 1
2 Chamber 1