PVA TEPLA ION-100

PVA TEPLA ION 100 Plasma Treatment System.
Features Include: Plug and play self installation
Flexible electrodes Industrial computer with
LCD touch panel and keyboard.
Windows based operating system.
Graphical User Interface (GUI) software complies with
CFR Title 21 Part 11 and Semi E95-1101 Multi-level user access
Software Recipe editor for fast and versatile step controls
Onboard diagnostic features and alarm logging
Remote process monitoring via
Ethernet Online web based simulation/training/support
Pump power outlet on the chassis
Energy saving feature—pump control

TYPICAL APPLICATIONS:
Surface cleaning
Surface activation
Surface functionalization
Deposition of siloxane and organic thin films

Technical Data Process Chamber Material:
Aluminum Dimension: 375 mm W x 762 mm D x 375 mm H (14.75”x30”x14.75”)
Volume: 107 L (3.78 ft3)
Electrodes: 7 Shelf- each shelf 12.5" x 24.5"
Number of MFCs: 3
Process Pressure: (0.16 to 2.66) mbar (120 to 2000) mTorr
Base Pressure: 0.07 mbar (50 mTorr)
Pumping Time: 1 min (Pump dependent)
Loading: Manual Plasma Generator Frequency/power: 13.56 MHz/1000 W 230V, 3Ph, 50/60Hz