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Used Plasma Etcher / Asher

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1

Vintage 2014 Condition: good Plasma Cleaning Exterior Dimensions Width 100.394 in (255.0 cm) Depth 31.8 Year(s) : 2014 Location : EUROPE (Western and Northern)

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Wafer Size: 150 Process: Metal 2x MXP R2Chamber, Mech Clamp, 29 slot Sto Elevator 2x OEM 12B RF Generator 2x A Year(s) : 1996 Location : EUROPE (Western and Northern)

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- 2 quartz vacuum chambers - RF power supply - Mass flow controlled gas delivery system - Roughing pumps and p Year(s) : 1993 Location : EUROPE (Western and Northern)

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Part No: 99-0339 Model No: A2000LL Diagram No: 99-2884 AURA 2000-LL Non-Copper CE Marked Sold As-Is Installed Year(s) : 2007 Location : EUROPE (Western and Northern)

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Batch systems for plasma cleaning or etching. Currently configured with only one 17 in. x 14 in. shelf set of Location : EUROPE (Western and Northern)

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Dual chamber, Dual robot arm 8inch wafer Year(s) : 1999 Location : EUROPE (Western and Northern)

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Etch 12 inch Dry Clean Wafer Size 12 inch Location : EUROPE (Western and Northern)

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2x Exelan, (EFEM, Mag7, Loader, RF cart missing) Process: oxide Wafer Size 12 inch Location : EUROPE (Western and Northern)

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8 Inch set up Year(s) : 1999 Location : EUROPE (Western and Northern)

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Refurbished Condition 2024 200mm wafer size Volts/Hz/Ph: 380 Volts/60Hz, 160 Amps/phase Estimated crate dimens Year(s) : 2006 Location : EUROPE (Western and Northern)

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This Semi Group PE System 1000PP & PE 1000PP Plasma Etching Systems appear to be in fair cosmetic condition, Location : EUROPE (Western and Northern)

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Wafer size: 8 Single wafer wet chemical processor Number of Chamber 1 Number of CHC 3 Number of Load Port 2 Year(s) : 1996 Location : EUROPE (Western and Northern)

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Wet Processing Station Model Nitride Location : EUROPE (Western and Northern)

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1

Modutek BENCH PHOS-ETCH Location : EUROPE (Western and Northern)

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A MXP ETCH B MXP ETCH C MXP ETCH Good Condition Year(s) : 1997 Location : EUROPE (Western and Northern)

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Type: ICP HR Etch System Wafer Size: 8" Location : EUROPE (Western and Northern)

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Configuration: - Cassette to Cassette Single Wafer Etcher - ESC - Classic - Particle reduction - Orbital gas Year(s) : 2001 Location : EUROPE (Western and Northern)

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Main frame. Cables 64*76*78 AC power rack 26*18*66 Utility box 25*20*75 RF rack 22*26*55 Chiller. Cables 33*25 Year(s) : 1999 Location : EUROPE (Western and Northern)

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ETCH MXP+ POLY 3CH 8” Vintage: 1995 CONDITION: AS-IS USED Year(s) : 1995 Location : EUROPE (Western and Northern)

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Condition: fully refurbished to OEM Specs. Model : TCP9600SE with DSQ & APM Operator Interface : bulkhead Sof Location : EUROPE (Western and Northern)

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Verteq Single Rinser/Dryer 1800-50 (Cobalt), 8" Year(s) : 1995 Location : EUROPE (Western and Northern)

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Centura is fully refurbished condition Chamber wall ,,frame is 2nd source.... three MXP plus oxide chamber(6in Location : EUROPE (Western and Northern)

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1

Polysilicon Etch Etch/Ash/Clean - Plasma Processing Currently Configured for: 200mm Current Equipment Status: Location : EUROPE (Western and Northern)

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1

Plasma cleaner Year(s) : 2013 Location : EUROPE (Western and Northern)

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The system was in production until February 2025. Wafer Size Range Minimum 150 mm Maximum 150 mm Set Size Year(s) : 1995 Location : EUROPE (Western and Northern)

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You can find used Plasma Etcher / Asher on Wotol

The main manufacturers of Plasma Etcher / Asher are Plasmatherm, Tegal, AMAT, LAM, Branson / IPC, Gasonics, Technics, Oxford, Matrix, Tepla, Branson, Axic, Applied Materials, March Instruments,Advanced , Akrion , Alcan Tech , Anatech , Anelva , APS , Aviza , Barrel , Canon , Chemcut , Depeltronic , DNS , Drytek , DSS , Ebara, Erretre , Fisons , Fusion , Gatan, Glen, GPTC, Hitachi, Hoellmueller, Innovative, Ion , Lam Rainbow, Lam Research, LFE , March , Matheson, Mattson, Metroline / IPC, Mitsui Shibaura, MKS, MRL Industries, Multi, Multiline, Nordson, Norfield, Novellus, Occleppo, Oxford Instruments, Perkin Elmer, PILL, Plasma, Plasma Technology, PSC, PSK, PVA, Research, Samco, Santa Clara, Schmid, Semi Group, Semitool, SEZ, Shibaura, Solaris, Spec, SPTS, Ssec, Steag, STS , Suss MicroTec , TEL , Toho , TOK , Tokyo Electron, Trebor, Ultratech, Ulvac, Unaxis Varian, Veeco, Verteq, Wise, Xinix , Yield Engineering Systems (YES), Yokogawa.

The main model PMC-PEM, 650/04/P-50Wise Alk, DV38, Telius 305 SCCM, AX7670-81 REV: A, RFX600A,GIGA 690, TORUS300K, V55-G, BOFA AD-350, PC-1100,  P-5020E P-5030, PE-8330A, ILD-4033,  Gamma 2100, 4520, 4420, ACP DPN HD, Tetra 150, 8300, 9104, DPS ll MESA T2,  DPSSeries, FLEX FX, TERA21, Rainbow-4420, OAPM-306B, Y Rainbow-4500, DES-112, Envision HDI DMS-E, PCB 1600, XS5-, NE-950EX V, co. Ltd. Typ TY-STP-S1, 650/06/P-50, Steag 300mm, RST101, 8330, M308, APIOS ISM CE-300I, SLR-720, R3A 500W, 9204, PX500, 300L ICP, TE3100 ICP, 830, 133 ICP - 380 Source, 1600-55A, 820 RIE, 90 Plus RIE, 790 RIE, PP-1000, VLN - Versaline , PX250, PM-600, PVLR ICP , 790Series VLR ICP MRL Industries Cyclon, SLR 720 RIE, 200E, RF350 C2 IBE, L3100/3, SLR 720,770 ICP, RF350 C2 IBD, RIE 800 – PC, Technics 220-II, SLR 730, 7200 RIE, SLR 720 RIE, 770 ICP, R1, 2000, 830, Oxford 90 Plus RIE R3A, RIE 800, 133 ICP - 380 Source, R3, l7300, PEII A, 600Series, Batchtop VII, PT530, 105Series, 700 VLRSeries, SLR 720, 770 ICP, SLR 720 RIE, HF-8, 730/720 RIE, 8800, NH3 & N2, P7200 RIE, PEII A, 300E, 600 Series, 303, 730/720 RIE, SLRSeries  8800, MK III , L3200, ATE-3000.

HS Code  8543 70 08 For Plasma cleaner machines that remove organic contaminants from electron microscopy specimens and specimen holders.
HS Code 8543 Electrical machines and apparatus, having individual functions, not specified or included elsewhere in this Chapter.  

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