Tepla 5157

Ref : 2773587-9

Condition : Used

Manufacturer : Tepla

Model : 5157

Year(s) : -

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

- Manual wafer load plasma asher
- Designed for Wafer Cleaning and Descum
- Plasma Chamber: Quartz
- Plasma Chamber Dims: 245mm diameter, 380mm depth
- Plasma Generation: 2.45 GHz Max / 1.000 Watt Variable
- Gas Lines: N2 Gas Input and 3 Process Gas Inputs
- Motor Driven Drawer Unit
- Vacuum Pump (Fomblin oil prepped)
- PLC Controls
- Touchscreen HMI

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