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Oxford 100 ICP-RIE 180
Ref :
2561078-9-W
Condition :
Used
Manufacturer :
Oxford
Model :
100 ICP-RIE 180
Year(s) :
2009
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
13 Dec. 2023
- Current Gas Configuration: H2, O2, N2, Ar, CF4, SF6, CHF3, He, CH4, Cl2 and BCl3
- Cryo Table w/ operatering temp: -150 to 400C
- RF source 300 W, 13.56 MHz
- ICP source 3000 W, 13.56 MHz
- Base pressure: 5E-7 Torr
- Load Locked
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