Plasmatherm Versaline VLN ICP Etcher

Ref : 2731355-9-W

Condition : Used

Manufacturer : Plasmatherm

Model : Versaline VLN ICP Etcher

Year(s) : 2012

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Plasmatherm Versaline VLN ICP Etcher consisting of:
- Manual Load Lock for Single or Multiple Wafers
- Single ICP Chamber
- Currently equipped for 200mm wafers with Mechanical clamp
- ENI GMW-25A RF Generator, 2500W, 2MHz,
with Seren AutoMatch Network
- MKS RF Generator, 13.56Mhz, with Seren AutoMatch Network
- (4) MFCs-gas with Isolation, Process and By-pass valves
- He Backside Cooling
- Lytron Chiller
- Edwards Turbo Pump with STP Control Unit
- Edwards TriScroll LL Pump
- Drytek PS80-A Screw Pump
- Windows Based OS
- 208V, 60A, 50/60 Hz, 3 phase, 4-Wire
- Vintage: 2012

Condition: Refurbished

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