Plasmatherm Versaline VLN

Excellent Condition Guaranteed.
Fully Refurbished by ClassOne.
6 Month Warranty.
30 Day Right of Return.
As-Is / Where-Is

Plasmatherm Versaline VLN ICP Etcher consisting of:
- Manual Load Lock for Single or Multiple Wafers
- Single ICP Chamber
- ENI ACG-6B RF Power Supply – 600W @ 13.56MHz with Seren AT6NVL Matchwork & MC2 Tunner
- ENI GMW-25A RF Power Supply – 2500W @2.0MHz with Seren AT25NVL Matchwork & MC2 Tunner
- VAT PM5 Pressure Controller with Leybold Turbo pump
- Seiko Seiki 1303CV Turbo Pump with Seiko Seiki SCU 750 controller
- VAT Gate Valve and Controller
- (5) MFCs-gas with Isolation, Process and By-pass valves
- He Backside Cooling
- Watlow chamber heater and controller
- Windows Based OS
- 208V, 60 Hz, 3 phase
- Vintage: 2011

Condition: Refurbished

Condition:
Excellent Condition Guaranteed.
Fully Refurbished by ClassOne.
6 Month Warranty.
30 Day Right of Return.
Pricing is Also Available.