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Santa Clara Plastic SCP EVOLUTION 200 (E200)

Ref : 2629136-9-CP
Condition : Used
Manufacturer : Santa Clara
Model : Plastic SCP EVOLUTION 200 (E200)
Year(s) : 2001
Quantity : 1
Location : Seller or machines location:
EUROPE (Western and Northern)

Wafer size: 8"
Condition: as is
- Load/Unload: Dual SMIF Arm with Wafer Transfer System (LRL process flow)
- Module Sulfuric
- Module Hot QDR + Megasonic
- Module SC1
- Module HF diluted
- Module QDR
- Module BHF
- Modules 7/8: End.Effector Wash and Dry + SCP Green Dryer

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