Semitool Sirius HydrOzone

Ref : 2222312-9-W

Condition : Used

Manufacturer : Semitool

Model : Sirius HydrOzone

Year(s) : 2004

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 13 Dec. 2023

- Wafer Size: 150mm & 200mm wafer capable
- Process: DI water/ozone
- Rinse: DI water with ammonium hydroxide
- Dry: N2
- Spray processing chamber.
- Uses a minimal amount of deionized water and ozone
- Low cost, low environmental impact process used for photoresist stripping, photolithography rework and organic cleans
- Does not require the use of sulfuric acid with its related delivery and disposal costs
- Manufacturer Serial #: 222078

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