STI 870 Spin Rinser Dryer Double Stack

Semitool STI 870 Spin Rinser Dryer Double Stack.
6” Wafer Rotor in the top spinner and a 4" Rotor in the bottom spinner.
High performance cleaning, rinsing and drying system for
25 wafer batch cassette.
This system is capable of cleaning substrates from 2” to 6” round if the correct
Rotor is installed for that wafer size. On axis orientation keeps
wafers parallel allowing DI water manifolds to spray both sides of
product continuously and simultaneously.
Built in resistivity monitor. 120V, 50/60 Hz,