SEZ SP203 (SM202-6-B)

SP203 Mainunit: 6 Inch Bernoulli Handling;
Pinlesschuck 6 Inch; Exhaust Up; 1 Medium Double Hex;
2 Medium Single Hex; Software: Major Version 117;
Minor Version 2015.08.21; Gem Version GEM 5.8;

3 Chemistry Cabinetts: Cabinett 1: Maintank and Buffertank;
Cabinett 2: Maintank and Buffertank; Cabinett 3:
Maintank; Chemistry Controller-Dos

Wafer Size Range
Minimum: 150 mm
Maximum:150 mm
Set Size: 150 mm

Problems: Keyboard switching; voltage fluctuations; chemistry-
cabinets heavily used; chemistry computer not original; modifications;
FFU controller; 1 cabinet drain box repaired;

No Spare Parts available
dismantling date: We can dismantle the tool in May 2026
Expected date of availability for the buyer: July 2026

Accessories
ISIS Controller (2.0.0.06.38-0159) and Measuring head

Cables are no longer available.

Other Information
The Tool was modified to allow the chemistry to be applied over it
Power Requirements 200-208 V 50.0 A 50/60 Hz 3 Phase
Year of Manufacture 1998
Condition Fair