SEZ SP304

SP304 Mainunit: The system is equipped with 8-inch Bernoulli handling,
Frontside and Backside (implemented by PTW) with Pinlesschuck and Pinchuck;
Cold DI in Nozzle; Hot DI in Dispenser; exhaust up;
heat exchangers: 1x double hex with Lauda for Di,
1x double hex with Lauda for Medium 2; 1x single hex with Lauda for
Medium 1 (not used), 1x single hex with Lauda for Medium 3;

Chemistry: 2 cabinets with Maintank and Buffertank and with Mixtank with
3 Paddle wheels to fill and with Pressure regulator for the facility lines;
with a Drainpumpstation.

Problems: Chemistry cabinets are used; some parts in the tool are corroded;
the tool has been repaired and converted to Bernoulli handling by PTW;
software adjustments have been made.

Wafer Size Range:
Minimum: 200mm
Maximun: 200mm
Set Size: 200mm
No Spare Parts available
dismantling date: We can dismantle the tool in June 2026
Expected date of availability for the buyer: August 2026

SP304 with 2 Chemistry Cabinets (8'')
Accessories
Drainpumpstation for 2 chemistry cabinets and Handlingsmodification from PTW

To Bernoulli-Handling;
Refurbished YES
Power Requirements Other V 32.0 A 50/60 Hz 3 Phase
Condition Fair