Speedfam EPD 300X Edge Grinder
AMERICA North (USA-Canada-Mexico)
Speedfam EPD 300X 300mm Edge grinder The SpeedFam EPD is an Edge Polisher for improving wafer edges on 300mm, 200mm and 150mm patterned wafers. The EPD uses slurry polishing action to improve wafer edges drastically. It is equipped with a post polish clean unit to achieve dry in dry out processing.