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SSE Maximus 804

Ref : 2332969-9-CP
Condition : Used
Manufacturer : -
Model : SSE Maximus 804
Year(s) : 2007
Quantity : 1
Location : Seller or machines location:
-
Last check : 17 Apr. 2024

Configuration:
Wafersize: currently set up for 8"
Coater: Open Bowl, 1 Dispense Arm
Backside Rinse (BSR) , Edge Bead Removal (EBR), 3 Dispense


Developer
Wafersize: currently set up for 8"
1 Dispense Arm with 2 Developer Lines, 1 DI Water Line, 1 N2 purge line, Backside Rinse (BSR)

Hotplates 3 units
Temperature up to 250 Degree Celsius
Lifting Pins stepper motor driven
HMDS Hotplate 1 Unit
Coolplates 3 Units
Lifting Pins stepper motor driven

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