Tegal 903e, Oxide
Ref :
1236333-9-W
Condition :
Used
Manufacturer :
Tegal
Model :
903e, Oxide
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
26 Mar. 2021
Manufacture : Tegal
Model : 903e
Specification:
used
Application : Oxide
Wafer Size : 6"
Operational Manuals
electronics Schematics & Spare Parts Drawing included
-Main system ; 44"W x 42"D x 26"H
500 lbs , 208 VAC, 30 Amp, 1 phase
-RF Generator CGA 10
-Pump (D30AC)
-Terminal Monitor / Keyboard
-Temp. Contorller (2 ea)
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