TEL Formula ALD HIGH-K

Ref : 2784246-9-C

Condition : Used

Manufacturer : TEL

Model : Formula ALD HIGH-K

Year(s) : 2015

Quantity : 1

Location : Seller or machines location:
EUROPE (Western and Northern)

Tube Material: Quartz
Boat Material: Quartz
Production wafeRs: 50
Pressure control: APC Valve

Process Gas: TEMAZ(F.S:1.0sccm),ZAC(F.S:1.0sccm),TMA(F.S:300sccm),
O3(F.S:20slm,300g/m3),N2,OCTANE
Vaporizer Maker:STEC(TMA,ZAC,TEMAZ)
Vaporizer TYPE:LSC-F530(TMA),TL-2011(ZAC,TEMAZ)
MFC Maker: STEC
MFC Model: Z500series
Process Temp: 200-300deg
HD included

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