TEL, Tokyo Electron Unity Me 85 DRM

Ref : 2594726-9-CP

Condition : Used

Manufacturer : TEL, Tokyo Electron

Model : Unity Me 85 DRM

Year(s) : 2013

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 12 Dec. 2023

Version: 200 MM
Vintage: 01.06.2013
Deinstalled in October 2021, warehoused.
Can be inspected by appointment. Basic configuration:-
Unity Me Mainframe
Transfer Robot: Yaskawa Electric XU-BDB1300
Qty 1 - DRM Process Chamber
Bottom Electrode: 1D10-150053-11
Upper Electrode: 1D10-204338-13
Focus Ring: 1D10-350791-11
Plate Baffle: 1D10-102848-13
Shield Depo: 1D10-315183-15
Ring Insulator: 1D05-300354-11
Cover Bellows: 1D10-204418-12
Turbo Pump: STP-A1303W1
Process Gases: C4F8, O2, Ar, He, CHF3
Qty 1 - RF Rack
ENI GHW-25A
Qty 1 - Monitor Panel
Qty 1 - AC Rack
Qty 4 - Dry Pumps
Lot Vacuum HD120

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