ThermoFisher Scientific Apreo HiVac SEM

The ThermoFisher Apreo HiVac SEM is a Schottky Field Emission Scanning Electron Microscope (FESEM)
that combines high and low-voltage ultra-high resolution capabilities with an electrostatic lens design.
The instrument features beam deceleration and unique in-lens detection offering unprecedented contrast
and versatility to researchers working with a variety of materials and devices.
Achievable resolution is 0.8nm at 15kV and 1.0nm at 1kV using the immersion lens.

Configuration
- Large capacity 5-axis stage with Nav-Cam visual navigation,
greatly increasing ease of use and sample throughput
- Beam current range: 0.78pA - 100nA
- Accelerating voltage up to 30kV, with landing energy as low as 20eV
- Everhart-Thornley detector (with secondary and backscatter modes)
- In-column detectors
- Sub-nanometer imaging resolution at high kV; ~ 1nm resolution at 1kV
- Directional backscatter (DBS) detector