Ulvac SOPHI-200

• Wafer Size Capability: 5 – 8 inch
• Version: 150 mm
• Beam Energy: Up to 200 keV
• Dose Range: 1×10¹⁰ – 1×10¹⁴ ions/cm²
• Beam Current: Approx. 500 µA
• Throughput: >100 wafers/hour (150 mm wafers)
• Features: Compact and lightweight
• Beam: Excellent parallel beam performance
• Optics: Low aberration ion-optics
• Contamination Control: Excellent for energy and metal contamination
• Designed For: Ultra-thin wafers used in power devices
• Condition: Deinstalled and warehoused
• Sales Condition: As is, where is
• Lead Time: Immediate availability