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AMAT, Applied Materials, Varian VIISta 810HP
Ref :
2780171-9
Condition :
Used
Manufacturer :
AMAT, Applied Materials, Varian
Model :
VIISta 810HP
Year(s) :
2018
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Wafer Sizes: 12"/300mm
IMPLANT MC
The VIISta 810 HP provides precise total incident angle and dosimetry control to
enable tighter distribution of electrical device parameters and a 50% reduction in
contamination to enhance device yields. The generic VIISta platform covers the range of
ion implantation energies from 200eV through to 3.75 MeV.
For medium current implants in the middle of that range,
the VIISta 810 HP provides control of Vt and halo implants, improving the
consistency of operating characteristics and yield across the wafer, the company claimed.
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