Varian Viision 200+

Implant Disc 13 Site, Silicon Coated

Two-dimensional beam profiler
Model/Type Viision 200+
Manufacturing Year 1997
WaferSize 200mm ( 8inch )
Implant Disc 13 Site, Silicon Coated
Two-dimensional beam profiler

CE-Mark yes
Computer System 147MHz Main & ES CPU
Cleanroom Monitor TFT
Remote Service Monitor not included

Source/Beamline
Source Chamber Shield Kit yes 1 included
Bernas Source yes 1 Spare available, on request
Mass Slit Shield Retrofit no

Implant:
New Infranor Amplifier Xtra Puls yes
Spin Amp Kollmorgen Servo Star S700 yes

Vacuum:
Terminal Rough Pump not included Edwards SetUp
Terminal Differential Pump Membran Pump
Source Turbo Pfeiffer HiPace 1500C
Beamline Turbo Pfeiffer TPH 1201 U P
Endstation Manifold Turbo Pump Pfeiffer HiPace 300
Endstation Rough Pump not included Edwards Setup
Endstation Differential Pump Membran or Scroll Pump
Cryo Compressor (2x) CTI 9600
Cryo Pump (4x) CTI 250F
4th cryo pump installed yes
50 Hz Frequency Kit yes

Additional Information:
No Roughing Pumps included
No Remote TFT included

Gasbox: calibrated for:
String #1 - SDS MKS-P2A 10 sccm Phosporus
String #2 - SDS UNIT 1662 10 sccm Arsine
String #3 - HP MKS-P2A 10 sccm BF3
String #4 - HP Tylan FC-2900 10 sccm Argon
PFG Unit 8160 5 sccm Xe
External Inert Gas Feed and Purge

Condition Very Good