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AMAT Centura TPCC EPN
Ref :
2768586-9-CP
Condition :
Used
Manufacturer :
AMAT
Model :
Centura TPCC EPN
Year(s) :
2011
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Electro Polished Nickel Frame & Modules
2ea ENP Centura Loadlocks for 200mm Wafers
Wafer Transfer Chamber with HP Robot
High Temperature Quartz End Effector
On the Fly Wafer Centering
2ea TanOx Chambers - Positions C & D
2ea ENP Fast Cooldown Chambers
V452 Main Control Board
Gas Panel with 2ea Gas Pallets
Interconnect Cables
AC Distribution Rack – 160A
Through the Wall Installation Kit
Please Inquire for Additional Details
Wafer Size Range Minimum 150 mm Maximum 200 mm Set Size 200 mm
Number of Chambers 2
Controller Type PC/VME
Process Gases 2ea Pallets
Condition Very Good
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