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Applied Materials eMax CT plus
Ref :
2740815-9-CP
Condition :
Used
Manufacturer :
Applied Materials
Model :
eMax CT plus
Year(s) :
2007
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Wafer size: 12
Turbo pump- Alcatel ATH 1600M
Bias RF (13.5 MHz)- Daihen RMN-50N1
LF Bias RF (2 MHz) -Daihen RMN-50N1
Source RF (60 MHz)- Daihen AMN-30H
Gate valve- Nor-Cal / NC-95-PP
RF Generator
13.56 MHz- ENI GHW-50A
2 MHz- ENI B-5002
60 HHz- AE Ovation 2760
FIB- eFib, wFib (Facilities Interface Box)
Chamber Equip Cart
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