Gasonics L 3200 Asher

Ref : 2747824-9-CP

Condition : Used

Manufacturer : Gasonics

Model : L 3200 Asher

Year(s) : 1993

Quantity : 1

Location : Seller or machines location:
EUROPE (Western and Northern)

Last check : 06 Oct. 2025

- 2 quartz vacuum chambers
- RF power supply
- Mass flow controlled gas delivery system
- Roughing pumps and pressure control systems (throttle valves)
- Electronics control system
- Automated robotic wafer handler
- The Asher employs two modes of process termination –
end point detection and end of process time
- Missing Robot - can be run by manually loading chamber 1 wafer at a time
1993 Vintage

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