Hitachi S-4800 II

Refurbished Hitachi S-4800 II.
Wafer : 200mm.
Vintage : 2004.
Secondary electron image resolution:
1.0nm (15kV, WD=4mm)
1.4nm (1kV, WD=1.5mm, Deceleration mode)
2.0nm (1kV, WD-1.5mm, Normal mode)

Magnification:
LM mode: 20 ~ 2,000X
HM mode: 100 ~ 800,000X

Specimen Stage:
Stage Motorization: 5 axis motorized
Type II: X: 0 ~ 110mm; Y: 0 ~ 110mm, Z: 1.5 ~ 40mm;
T: -5 ~ +70 deg, R: 360 deg.

Operating System:
Windows XP Professional

Options:
Joystick for stage control
CD Measurement Function
RS-232C
Deceleration function
Video Amplifier unit
200mm load lock (upgrade from 150mm)