Hitachi S-7000 Critical Dimension SEM (CD-SEM)

Hitachi S-7000 critical-dimension scanning electron microscope (CD-SEM)
for fully automated CD measurement on patterned wafers,
with a field-emission electron gun.
- Cassette-to-cassette handling for 4 in, 5 in and 6 in wafers
- 100X to 100,000X magnification
- CD measurement range 0.1 to 200 microns
- 15 nm guaranteed secondary-electron image resolution (at 1 kV)
- Reproducibility +/-0.02 micron or +/-1%, whichever is greater
- Accelerating voltage 0.7 to 3 kV (100 V/step)
- Auto-focus and auto-stigmation
- Fully automated CD measurement
- Fully programmable stage with up to 60 deg tilt
- Multi-point measurement capability