KLA SPECTRACD-XT
Ref :
255109
Condition :
Used
Manufacturer :
KLA
Model :
SPECTRACD-XT
Year(s) :
2010
Quantity :
1
Location :
Seller or machines location:
United States (USA)
United States (USA)
Last check :
26 Feb. 2025
Wafer Size 300 mm
Fab Section Metrology
General Product Information
Vendor Supplier KLA-TENCOR
Model SPECTRACD-XT
Asset Description OCD Measurement Tool
Software Version 050032
CIM SECGEM
Process OCD Measurement
Hardware Confguration (Fab)
Main System Handler System Phoenix Transporter 2 1 OK
Main System MainFrame 1 OK
Factory Interface FOUP 1 OK
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