KLA-Tencor ASET F5x

KLA-TENCOR ASET F5x THIN FILM MEASUREMENT SYSTEM consisting of:
- Model: ASET F5x
- Can be configured to run either 200mm or 300mm wafers
- Dual Cassette 300mm FOUP Handler or 200mm Open Cassette Handler
- Spectroscopic ellipsometer
- Dual-beam spectrometer (DBS)
- Xenon light source with 220nm to 800nm wavelength range (1 Xenon Lamp)
- Three user selectable DBS spot sizes: 2.7, 10, 40 um
- Pattern Recognition (KLA F5x)
- 450 hz MMX Computer
- 9.1GB SCSI hard drive and 3.5” floppy disk drive
- 128 Mb DRAM
- Color VGA Monitor
- KLA F5x Keyboard and trackball
- Windows NT Operating System
- 2.0 GB Random Access SCSI Jazz back-up drive (1 cartridge)
- Ethernet PCIA Card
- Multi-Layer Film Capacity
- Micro Spot Optics
- Scanning Stage (KLA F5x)
- Wafer Mapping
- In-Situ Capability
- Controller Type: PC/VME
- CE Marked
- Operator Manual for KLA F5x System

Condition:
Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.