KLA-Tencor LDS 3000 M/Smif Macro Inspection Waf. Tool 6-8"
Ref :
280462-9-W
Condition :
Used
Manufacturer :
KLA-Tencor
Model :
LDS 3000 M/Smif Macro Inspection Waf. Tool 6-8"
Year(s) :
2006
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Last check :
21 Jul. 2011
- LDS 3000 M/Smif, 6 and 8" capable
- 1x smif Indexer INX2150 (6") and 1x smif Indexer INX2200 (8")
- UV-option
- OCR Reader Lkx5 (front)
- EBR (Edge Bead Removal)
- Spot Check Software
- Defect Standard Wafer 200mm
- VISCONT NT ADR Bassic
- Memory Extension
Remark: The machine has to be repaired because of handling problem (arm bend); so this has to be repaired by KLA (cost approx 25k$)
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