LAM 4520

- Hine indexer
- 1 chamber
Automation online component: SECS/GEM
- No fixed gap chamber
- EPD: Verity EP200Mmd (250~730nm)
- Surface finish: 10 RA
- Standalone Gas Box mounting
- Standalone Gas Box Std stacking kit
- Gas lines: 8
- GAS 1:Ar_1000 sccm (UFC-1200A)
- GAS 2:CF4_200 sccm (UFC-1200A)
- GAS 3:CHF3_100 sccm (UFC-1200A)
- GAS 4:N2_50 sccm (UFC-1661)
- GAS 5:O2_20 sccm (UFC-1661)
- GAS 6:SF6_20 sccm (UFC-1200A)
- GAS 7:Ar_100 sccm (UFC-1200A)
- GAS 8:cf4_20 sccm (UFC-1200A)
- Orbital Gas panel
- Helium pressure controller: Unit UPC
Vacuum System:
- AOV 85 exist: N2:50sccm
- Chamber manometer: 10 Torr
- Pressure control valve: throttle valve, 839-013901-001
Temperature Control:
- Chiller type: M/W 2080
- Temp control system: Anafaze
RF System:
- RF generator: AE PDW2200
- Match: LOFAT
Computer System:
- Software version: Envision 1.5 above
- PC: Intel P4 1.2Hz above
- Monitor: TFT LCD