Lasertec VL-2000 Confocal Microscope

408nm GaN (Gallium Nitride) blue laser confocal microscope
for CD measurement and surface profilingSemprex 200mm stage
with linear encoders, digital display, and optional paddle
with theta rotation
0.14u resolution
1/15th second scan speed
1ZC1 Z axis controller
Nikon microscope with (4) BD CF Plan BD DIC objectives:
5x, 10x, 20x, 50x
Optional: TMC vibration isolation platform