MRL Industries Bandit 218 LPCVD Furnace

Ref : 2809167-9-W

Condition : Used

Manufacturer : MRL Industries

Model : Bandit 218 LPCVD Furnace

Year(s) : -

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

200mm LPCVD furnace
tube 1: TEOS/anneal
tube 2:Nitride/poly,
gas connections: air low N2, N2, FG1, Ar, O2, SiH2Cl2(DCS), SiH4, NH3
2 Kashiyama vacuum pumps
furnace dims: 66x36x78
gas module dims: 18x36x78
power req: 480v, 250amps max
complete specifications upon request

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