Nanometrics Nanospec 9300

Nanometrics Nanospec 9300 Thin Film Thickness Measurement

Wafer Size 12"
Vintage 2002
Currently 12" configured (It can be modified for 8" open cassette handling)
Spectroscopic Reflectometer (SR)
Two optical light sources
Visable tungsten halogen lamp
UV deuterium arc lamp
Lens 4x,15x (Visible & UV)
System Computer & LCD Monitor
Windows XP-based N2000 metrology software(Version N2000 4.2.90 Beta)
Head Type : UV DIO
Video camera : RS170(B/W)
Wafer Handling
Kensington Robot & Stage
Asyst FOUP 300mm
Input power
208VAC 18A 50/60Hz