Plasma DES-220

Wafer size: 200mm
Date of Last PM : 17th Dec 2015
System is not On-Line
Off-Line Date (if applicable) is June 2016
All Cables are present
Handler Type : Lifter
# of Cassette / FOUP Loaders : 4
No pre-aligner
Communication Interface is SECS
Facility Requirements :
CDA : 5-7 Kg/ cm2
DIW : 75 PsiG/min
Vacuum : Φ150mm 4M / min
Gas : 2 – 4 Kg/ cm2
Power : 208V 60Hz 304W 150A

The Quartz tube*2 / Quartz boat*2 / Matcher*2 / Screen*3 / ISO*2 /
Throttle valve*2 / Lifter arm*1 / PLC CV1000*2 may have been missing or damaging.

Not include the Asyst LPT 2200 SMIF loader*2