Plasmatherm 790 PECVD 11"

Resistive heated lower electrode up to 350 C, watlow temperature controller
Cooling/heating circuit in chamber walls
MKS throttle valve pressure control
VAT Al body gate valve assembly--ISO 100
2 torr manometer
Windows 98 Operating System
Process Gases--All MFCs will be cleaned and calibrated to NIST standards:

2-N2 500sccm
2-N2 1000sccm
1-SF6 50sccm
1-Ammonia 20sccm

Operating manuals and related documentation included.
Vacuum pump and chiller are not included.