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Plasmatherm SLR-720
Ref :
2127851-9-W
Condition :
Used
Manufacturer :
Plasmatherm
Model :
SLR-720
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
13 Dec. 2023
- Single chamber with load lock
- Can process up to 8"/200mm wafers
- Turbo Pump
- AEI/RFPP RF5S 500W RF Generator
- Leybold Trivac D65BCS Vacuum Pump
- Leybold Trivac D25BCS Vacuum Pump
- Neslab HX-75 Recirculating Chiller
- Power Box
- Process Software
- Computer upgraded in 2011 by OEM / runs Win 98
- Set of Operation and Maintenance Manuals
- 4 MFCs:
*SF6
*N2
*CHF3
*O2
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