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SemItherm VTP 1500

Ref : 2382958-9
Condition : Used
Manufacturer : -
Model : SemItherm VTP 1500
Year(s) : 1995
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 09 Feb. 2026

VTP 1500 LH LPCVD (SiN) Reactor is
Configured for SiN processing of 200 mm wafers. System
Is fully automated with cassette to cassette handling and
offers high throughput.
Comes with a newly refurbished robot and a long list of associated glassware
In good operating condition.

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