Spec 3510E PC Isotropic Etch System

Brand: SPEC
Model:GaSonics 3510E
PC Isotropic Etch System

Used
Details:
SPEC Equipment has developed the new
GaSonics L3510E PC isotropic etching system
Designed for high etch rates, the 3510 PC provides isotropic profiles
along with the ability to etch or ash at low temperatures
The new PC interface utilizes the proven L-Series 3510 process hardware
while replacing the legacy electronics and components
These new modernizations include
a newly designed contemporary control system
color Graphic User Interface, real time graphing
and saved data recall. With excellent process controls
and proven downstream microwave source
the 3510E PC provides a wide range of process capabilities
and applications
The system also includes a topside lamp option for
heating the substrates in a
“pins up” mode. The “pins up” mode allows backside
etching of various materials
Enhanced reliability
75-200mm, GaAs, Sapphire, Silicon
Only three moving parts
Platen and lamp heating
12 steps recipes
High throughput
Reliable endpoint detection
Small footprint
SECS II Interface
Optional SMIF Indexer
Stand-alone or flush mount