Tegal 300 SemiAuto

- Manual Wafer Load Plasma Asher
- Used for Wafer Cleaning and Descum
- Can Process up to 150mm Wafers
- Faraday Cage
- Computer PC Controlled
- Plasma Chamber: Quartz
- Plasma Chamber Dims: 245mm Diameter, 380mm Depth
- Plasma Generation: 2.45 GHz Max / 1,000 Watt Variable
- Gas Lines: N2 Gas Input and 2 Process Gas Inputs
- All MFCs Rebuilt and Calibrated
- Vacuum Pump (Professionally Rebuilt)
- Operators Manual for Tepla 300
- System Refurbishment Includes: All Consumables (O-Rings, Seals) Replaced, MFCs Rebuilt and Calibrated, Quartz Chamber Cleaned, Vacuum Pump Rebuilt, and more.
- Excellent Condition Guaranteed!