Cambridge Fiji F200

Ref : 2075837-9-GO

Condition : Used

Manufacturer : Cambridge

Model : Fiji F200

Year(s) : -

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 26 Nov. 2019

Description:
Atomic layer deposition system with load lock
Any substrate up to 200 mm wafer
Plasma enhanced ALD available with O2, Ar, and N2 gases
Thermal ALD with temperatures up to 300°C
Turbo pump with APC

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