Semilab WT-2000PVN( μ-PCD) Carrier life time measurement

Wafer Size 8"
Vintage 2009-5
Tool's Condition Excellent
■ System Configuration
. WT2000PV main unit with scanning capability
. Sample stage (Max wafer size 200mm)
. Dual PC : DOS PC & Window PC
. μ-PCD head for lifetime measurements
. Application S/W : Wintau 32 ( Windows PC )
. Vacuum pump
. Utility :
- Power : 220V or 115V, 50/60Hz
- Vacuum : 1/4" 0.2 ~0.5 bar
■ Hadware Function Capability
. μ-PCD measurement (904 nm Laser)
. Laser Power Feedback
. Automatic Head Height
. Capacitive Sensor
. Head Temperature Sensor
. Others
■ Application
. Monitoring defects and contamination ( bulk and surface region of Si wafer)
■ Measurement
. Carrier Lifetime Measurement (μ-PCD), Laser wavelength : 904nm
. High resolution mapping and discrete point measurements

*. Fully refurbished.
*. Installed in Clean-room.
*. Can demonstrate any time.