Semilab WT-2020( μ-PCR) Carrier life time measurement

Wafer Size 8"
Vintage 2018-4
Tool's Condition Refurbishing

■ System Configuration
. WT2020 main unit with scanning capability
. Dual PC : DOS PC & Window PC
. μ-PCR head for lifetime measurements
. Application S/W : WSOS2 ( DOS PC ), Wintau 32 ( Windows PC )
. Vacuum pump
. Utility :
- Power : 220V or 115V, 50/60Hz
- Vacuum : 1/4" 0.2 ~0.5 bar

■ Hadware Function Capability
. μ-PCD measurement (904 nm Laser)
. Laser Power Feedback
. AUX Laser (Option) : 500 mW, 349nm
. Others

■ Application
. Monitoring defects and contamination ( bulk and surface region of Si wafer)
. Characterization of thin film samples

■ Measurement
. Carrier Lifetime Measurement ( μ-PCD/μ-PCD )
. High resolution mapping and discrete point measurements
. Characterization of thin film samples