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Suss MicroTec MA-150CC

Ref : 2003157-9-FM
Condition : Used
Manufacturer : Suss MicroTec
Model : MA-150CC
Year(s) : 2002
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Power supply: CIC 1200
PC Type: DSM-P233 MMX
Relay interlock box
TSA camera: XC-50
TSA objectives: 5 x / 0.15, 10 x / 0.30, 20 x / 0.40
BSK microscope: 520R Rechts / Right
BSA-Camera 264537 Rechts / Right
Cognex 5000
Power meter
Exposure optics: UV 400
Prealigner
Prealigner sensor head: SI / GAAS / INP
Mask holder
Chuck

Main microcontroller:
Input card: 260PC105-05
Input card: 260PC113-01
D/A Cov DVM²: 260PC102-05
Parallel input / Output exp BSA: 260PC103-03
Valve driver: 260PCPC103-01
Funnel prealigner: 260PC129-02
Manipulators: 260PC116-01
D/A Conv DVM BSA: 260PC102-05
Motor driver DVM²: 260PC109-02
Elevator right: 260PC119-01
Elevator left: 260PC119-01
Microscope x-motor: 260PC119-03
Mask x-motor: 260PC156-04
Microscope y-motor: 260PC119-03
Mask y-motor: 260PC156-04
Microscope motor: 260PC119-03
Mask motor: 260PC156-04
Z-Axis: 260PC119-03
Wafer transfer: 260PC126-03
4 Channels A/D card MOM: 260PC176-03
CPU MOM: 260PC105-16
Stage driver MOM: 260PC168-06
Valve driver 3CB: 260PC104-01
Power supply standard: 260PC124-02

Power: 230 V
Lamp: 350 Watt bulb